| Date | Company | Security | Transaction | Code | Indirect | 10b5-1 | $Price | #Shares | $Value | #Remaining |
|---|---|---|---|---|---|---|---|---|---|---|
| 11 Mar 24 | ASYS Amtech Systems | Amtech Systems, Inc. $0.01 par value common stock | Grant | Acquire A | No | No | 4.73 | 2,000 | 9.46 k | 16,689 |
| 7 Mar 24 | ASYS Amtech Systems | Amtech Systems, Inc. $0.01 par value common stock | Grant | Acquire A | No | No | 4.9097 | 1,500 | 7.36 k | 14,689 |
| 6 Mar 24 | ASYS Amtech Systems | Amtech Systems, Inc. $0.01 par value common stock | Grant | Acquire A | No | No | 4.8529 | 6,000 | 29.12 k | 13,189 |
| 6 Mar 24 | ASYS Amtech Systems | RSU Amtech Systems, Inc. $0.01 par value common stock | Grant | Acquire A | No | No | 0 | 8,299 | 0.00 | 8,299 |
