| Date | Company | Security | Transaction | Code | Indirect | 10b5-1 | $Price | #Shares | $Value | #Remaining |
|---|---|---|---|---|---|---|---|---|---|---|
| 15 Mar 24 | ASYS Amtech Systems | Amtech Systems, Inc. Employee Stock Option Amtech Systems, Inc. $0.01 par value common stock | Grant | Acquire A | No | No | 4.73 | 30,000 | 141.90 k | 30,000 |
