Yoon Ah OH

Date	Company	Security	Transaction	Code	Indirect	10b5-1	$Price	#Shares	$Value	#Remaining
25 Oct 24	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	204.39	1,296	264.89 k	13,014
15 May 24	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	233.63	603	140.88 k	14,310
18 Mar 24	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	180	1,685	303.30 k	14,913
15 Mar 24	ONTO Onto Innovation	Common Stock	Sell	Dispose S	No	Yes	173.96	2,685	467.08 k	16,598
1 Mar 24	ONTO Onto Innovation	Common Stock	Grant	Acquire A	No	No	0	1,883	0.00	19,283
1 Mar 24	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	941	0.00	941
1 Mar 24	ONTO Onto Innovation	Performance Stock Unit Common Stock	Grant	Acquire A	No	No	0	941	0.00	941
14 Feb 24	ONTO Onto Innovation	Common Stock	Payment of exercise	Dispose F	No	No	173.08	493	85.33 k	17,400

Data from 3, 4 and 5 filings. Values as filed, not updated for current price.